The Federal Office of Metrology of Switzerland (METAS)
is the federal office of metrology of Switzerland. The Radiofrequency & Microwave Laboratory (www.metas.ch/hf) brings expertise in microwave measurement technology in general, simulation techniques, modelling and uncertainty evaluation. METAS is skilled in applying micro and nano fabrication clean room techniques and has access to corresponding state of the art facilities.
METAS is contributing to new on-wafer probing techniques at high frequencies. It is developing novel small pitch size (down to 2 µm) on-wafer probes based on pulled glass capillaries. The small pitch size aims at reducing parasitic effects at higher frequencies. The probes are tested for repeatability, durability and general usability and their performance is compared against conventional on-wafer probes.